Semiconductor spare parts & service that get your CMP and wafer cleaning tools back up fast
IFS Services provides spare parts, refurbishment, servicing, and sales of semiconductor equipment — CMP, Wafer Cleaning, Chemical Distribution, and Litho Track systems — for OnTrak, SVG, IPEC-Westech, Speedfam, and AMAT Mirra® platforms.
Can't find the part you need? Call (480) 558-4377 or email sales@ifs-az.com for a quote.
Platforms we support
OnTrak®SVG®IPEC-Westech®SpeedfamAMAT Mirra®IFS Services at a glance
IFS Services is a semiconductor equipment parts and service company in Gilbert, Arizona, founded in 1996 to provide worldwide system and spares support for wafer cleaning systems. IFS supplies spare parts, refurbishment, field service, and sales of CMP, wafer cleaning, chemical distribution, and litho track systems for OnTrak®, SVG®, IPEC-Westech®, Speedfam, and AMAT Mirra® platforms. The team has over 75 years of semiconductor industry experience, IFS has sold over 100 refurbished systems, and 139 parts and systems are listed in its online shop. Services include sub-assembly repair, pump/motor/gearbox rebuilds, CMP platen recoating, and a sub-assembly exchange program. IFS has a main office at 3317 S Higley Rd., Suite 114-290, Gilbert, AZ 85297 and is represented in Wuxi, China by GVS Tech. Quotes: (480) 558-4377 or sales@ifs-az.com.
Every hour a tool is down costs you
Legacy CMP and wafer cleaning platforms keep producing — until a part fails, an assembly wears out, or the OEM no longer supports it.
Unplanned downtime
A failed spindle, brush assembly or pump stops production while you wait for parts or service.
Obsolete & hard-to-find parts
Older OnTrak, IPEC, SVG, Speedfam and AMAT Mirra® tools need parts that are harder to source every year.
Paying for what you don't use
Bundled foundry services add cost when all you need is the right system, part or service call.
Shop semiconductor parts by platform
Replacement and aftermarket parts, sub-assemblies, and refurbished systems for CMP and wafer cleaning tools — ready to quote or order online.
OnTrak® Parts
Brush, spindle, roller, motor and cable assemblies for OnTrak DSS-200 and Synergy™ wafer cleaners.
Shop OnTrak →
IPEC® Parts
Slurry arms, load cup assemblies, bellows, fittings, nozzles and boards for IPEC-Westech CMP tools.
Shop IPEC →
AMAT Mirra® Parts
Aftermarket alternatives for Mirra®, MirraTrak® and Mirra® Mesa — clamps, DI water hoses, regulators, end effectors.
Shop AMAT →
Equipment for Sale
Refurbished systems including an IPEC Westech Avanti 472 CMP, OnTrak Synergy™ cleaners and an SSEC Evergreen scrubber.
View equipment →Need something not listed? See our additional parts list or send us the part number — we'll source it.
Browse all 139 partsA complete solution provider for semiconductor equipment
Refurbishment, servicing, and sales of CMP, Cleaning, Chemical Distribution, and Litho Track systems — with service from locations worldwide, spare parts, and systems design.
Field Service & Support
- Global field support
- Service & PM contracts
- Tool down & escalation support
- Process applications support
- Tool install and de-commission
Repair & Rebuilds
- Sub-assembly repair
- Edwards QDP series vacuum pumps
- Diaphragm / bellows fluid pumps
- Morse gearboxes (IPEC tools)
- NSK & Yaskawa motors & drives (AMAT Mirra®)
- CMP platen recoating (AMAT Mirra®, IPEC®)
Engineering & Design
- Electrical and mechanical design
- Prototype system development
- Obsolete parts replacement
- Mechanical upgrades
- Materials replacement
- Special substrate handling
Swap in a ready sub-assembly and cut tool downtime
Exchange units available for key OnTrak® and AMAT® assemblies. Other sub-assemblies available upon request.
- AMAT® base gear box
- OnTrak® spin carriage assemblies
- OnTrak® spin station spindles
- OnTrak® brush lifter assemblies
- Other sub-assemblies on request
Less downtime. Lower cost of ownership.
Our principals and engineers come from OEM Service and Process, and FAB Equipment Engineering roles.
Fast response, competitive rates
We save you time and money by limiting downtime and lowering your total cost of ownership for equipment.
Pay only for what you need
We specialize in systems, parts, and service — so you pay for the system you purchase, not foundry services you don't use.
Deep system inventory
We carry dozens of CMP and Litho Track systems in inventory to serve you better and give the best pricing.
Proven, repeat-customer track record
With over 100 refurbished systems sold, multiple customers come back time and again for additional systems, services, and spares support.
“We get it right the first time.”
The IFS Services field service mottoFrom quote to delivery in 3 simple steps
- 1
Send your request
Share the part number, tool platform and quantity — or describe the service or system you need. Online form, phone or email.
- 2
Get your quote
Our team confirms availability, options (aftermarket alternatives, refurbished systems or exchange sub-assemblies) and sends a quote.
- 3
Receive parts or service
Approve the quote and we ship the part or schedule the field service — so your tool gets back to production.
Frequently asked questions
Quick answers about platforms, repairs, the exchange program, quotes and locations.
What semiconductor equipment platforms does IFS Services support?
IFS Services handles systems, spares, and service for OnTrak®, SVG®, IPEC® (IPEC-Westech), Speedfam, and AMAT Mirra®, Mirra Mesa®, and MirraTrak® systems — covering CMP, wafer cleaning, chemical distribution, and litho track equipment.
Does IFS repair or rebuild sub-assemblies?
Yes. IFS offers sub-assembly repair and pump, motor, and gearbox rebuilds, including Edwards QDP series vacuum pumps, diaphragm/bellows fluid pumps, Morse gearboxes (IPEC tools), and NSK & Yaskawa motors and drives (AMAT Mirra®). IFS also offers CMP platen recoating for AMAT Mirra® and IPEC® tools.
How does the Sub-Assembly Exchange Program work?
The Sub-Assembly Exchange Program offers exchange units for the AMAT® base gear box, OnTrak® spin carriage assemblies, OnTrak® spin station spindles, and OnTrak® brush lifter assemblies. Other sub-assemblies are available upon request — contact IFS at (480) 558-4377 or sales@ifs-az.com for availability and terms.
Does IFS sell refurbished semiconductor equipment?
Yes. IFS has sold over 100 refurbished systems and carries dozens of CMP and Litho Track systems in inventory. Equipment currently listed for sale includes an IPEC Westech Avanti 472 Chemical Mechanical Polisher, OnTrak Synergy™ Wafer and Substrate Cleaners, and an SSEC Evergreen Scrubber Model 200.
Does IFS provide field service for semiconductor tools?
Yes. IFS provides global field support, service and PM contracts, tool down support, escalation support, process applications support, and tool install and de-commission. The field service motto is “We get it right the first time.”
How do I request a quote for a part or service?
Use the quote request form, call (480) 558-4377, or email sales@ifs-az.com. If you can't find the part you're looking for on the site, contact IFS anyway to request a quote.
Where is IFS Services located?
IFS Services' main office is at 3317 S Higley Rd., Suite 114-290, Gilbert, AZ 85297 USA, serving Gilbert, Chandler, and the surrounding towns. IFS is also represented in China by GVS Tech, Room 509, No. 260 Gao Lang East Road, Singapore Industrial Park, New district, Wuxi 214028, and provides service from locations worldwide.
Tell us the part number. We'll handle the rest.
Send the OEM or IFS part number, quantity and tool platform. If you can't find the part on our site, we can still help — just ask.
(480) 558-4377
sales@ifs-az.com
Request a quote online
Use our secure quote form to send part numbers, quantities and your tool platform (OnTrak, IPEC, AMAT, SVG, Speedfam or other). Our sales team will reply by email or phone.
Prefer to talk? Call (480) 558-4377 or email sales@ifs-az.com.
Contact IFS Services
Serving Gilbert, Chandler and the surrounding Arizona semiconductor community — with support worldwide.
Main Office — USA
3317 S Higley Rd.Suite 114-290
Gilbert, AZ 85297 USA
Phone, Fax & Email
Phone: (480) 558-4377
Fax: (480) 383-6239
Email: sales@ifs-az.com
China — GVS Tech
Room 509, No. 260 Gao Lang East RoadSingapore Industrial Park
New district, Wuxi 214028