AMAT in Gilbert and Chandler, AZ

AMAT Mirra CMP tools in Gilbert and Chandler, AZ, can be configured as AMAT Mirra®, MirraTrak®, and Mirra® Mesa, it is an ideal tool for polishing tungsten, silicon, polysilicon, shallow trench isolation (STI) and copper damascene applications. The multi-zone polishing heads and high-speed platens can be tuned to optimize these processes using low down-force, resulting in excellent planarity and minimal dishing and erosion. When integrated with the Mesa cleaner it offers a dry in, dry out process which minimizes operator handling and the associated damage.

IFS Services handles systems, spares, and service for AMAT Mirra®, MirraTrak, and Mirra® Mesa, contact us to find solutions for your requirements.

To learn more AMAT, call (480) 558-4377 or click here to contact our team today!