AMAT
AMAT in Gilbert and Chandler, AZ
AMAT Mirra CMP tools in Gilbert and Chandler, AZ, can be configured as AMAT Mirra®, MirraTrak®, and Mirra® Mesa, it is an ideal tool for polishing tungsten, silicon, polysilicon, shallow trench isolation (STI) and copper damascene applications. The multi-zone polishing heads and high-speed platens can be tuned to optimize these processes using low down-force, resulting in excellent planarity and minimal dishing and erosion. When integrated with the Mesa cleaner it offers a dry in, dry out process which minimizes operator handling and the associated damage.
IFS Services handles systems, spares, and service for AMAT Mirra®, MirraTrak, and Mirra® Mesa, contact us to find solutions for your requirements.
To learn more AMAT, call (480) 558-4377 or click here to contact our team today!
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BRUSH, PVA, w/ CORE (MIRRA-MESA, 200mm) 704-10736
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ASSY, REGULATOR (Replaces 3800-01125, AMAT 0015-03787) 604-11079
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ASSY, HOSE, DI WATER, 30″L (IFS Aftermarket of AMAT 3400-01448) 604-11121
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ASSY, HOSE, DI WATER, 33″L (AMAT 3400-01449 Alternative) 604-11122
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END EFFECTOR, MIRRA STANDALONE & TRAK, CARBON FIBER (AMAT PN 0040-77013) 404-10071
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DRIVE REDUCER 10:1, GEAR HEAD, CARBON STE (3790-00054 Alternative) 404-10803
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ROBOT MOTOR (AMAT 0190-16234 / 0090-01473) 504-10876
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ASSY, APC – MIRRA ANALOG REPLACEMENT CARD, TWO CHANNEL STANDARD DDF3 w/ TUBING & FITTINGS 604-10164
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ASSY, CLAMP, POLISHING HEAD, UNIVERSAL (AMAT 0010-23601 alternative) 604-10768
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GIMBEL BASE 0040-77539
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BEARING 0190-77131
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BELT, TIMING, METRIC 3080-01096
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FTG ELBOW, SWIVEL, NYLON 3300-05727
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WASHER, SEALING 3880-01644
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INNER CLAMP RING MANIFOLD FLANGE 0020-79087
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MEMBRANE, FLEXURE, 6″ TITAN HEAD 0021-19619
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INNER TUBE, 6″ TITAN HEAD 0021-77621
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MEMBRANE, SILICON 0021-81354
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HOUSING, TRAVEL, DDF3 0040-77538
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GASKET, ROBOT BLADE 0020-78177