AMAT

Mirra CMP tools can be configured as a Mirra®, MirraTrak®, and Mirra® Mesa, it is an ideal tool for polishing tungsten, silicon, polysilicon, shallow trench isolation (STI) and copper damascene applications. The multi-zone polishing heads and...

IPEC

The IPEC 472 CMP polisher is a dry in, wet out fully automated polisher, which is one of the most versatile single wafer polisher ever produced. The 472 can handle a wide variety of wafer sizes from 100mm up 200mm and virtually all slurry types....