AMAT

Mirra CMP tools can be configured as a Mirra®, MirraTrak®, and Mirra® Mesa, it is an ideal tool for polishing tungsten, silicon, polysilicon, shallow trench isolation (STI) and copper damascene applications. The multi-zone polishing heads and...

Antlia Systems

Our Antlia systems are custom built for your specific needs. These systems are currently installed in several production facilities and one OEM process Lab. Let IFS engineer a solution for your needs with a system that is Reliable and...

CFEE

Carbon Fiber End Effectors & Robot Blades IFS is pleased to offer Carbon Fiber End Effectors and Robot Blades. Over 250 different types are already in use in several FAB’s and Silicon manufacturing sites worldwide for over ten years....

Custom Equipment

Whether you need something new, modified, or something that just isn't available, IFS can help. We can provide modification services to existing Lab and Fab equipment such as adding re-circulation pumps to commercially available baths, Modify...

IPEC

The IPEC 472 CMP polisher is a dry in, wet out fully automated polisher, which is one of the most versatile single wafer polisher ever produced. The 472 can handle a wide variety of wafer sizes from 100mm up 200mm and virtually all slurry types....

Ontrak Cleaners

The DSS-200 scrubs, rinses and dries six to eight inch (150 mm - 200 mm) wafers. It consists of system electronics, a send indexer, an outside, inside brush station, spin station and robotic edge handling receive handler. Customized systems may...

Process Equipment Spares

We offer a comprehensive inventory of spare parts for Mirra, OnTrak, Ipec from obsolete electronics to replacements to meet your process needs into the future. We have repair programs for every PCB, Motor Gearbox and sub-assemblies. Our full line...