The IPEC 472 CMP polisher is a dry in, wet out fully automated polisher, which is one of the most versatile single wafer polisher ever produced. The 472 can handle a wide variety of wafer sizes from 100mm up 200mm and virtually all slurry types. Ideally suited for tungsten and oxide processes and flexible enough to polish silicon and polysilicon, the two platen system polishes on platen one and buff's or rough cleans on the second platen depending upon your process. This makes the 472 and ideal polisher for R&D and production fabs.
IFS Services; sells, services and carries a large line of spare parts for IPEC 472, contact us for all your IPEC needs.