Mirra CMP tools can be configured as a Mirra®, MirraTrak®, and
Mirra® Mesa, it is an ideal tool for polishing tungsten, silicon, polysilicon, shallow trench isolation (STI) and copper damascene applications. The multi-zone polishing heads and high-speed platens can be tuned to optimize these processes using low down-force, resulting in excellent planarity and minimal dishing and erosion. When integrated wit the Mesa cleaner it offers a dry in, dry out process which minimizes operator handling and the associated damage.
IFS handles systems, spares and service for Mirra®, MirraTrak, and Mirra® Mesa, contact us to find solutions for your requirements.